Correlation between optical, morphological and compositional properties of Aluminum Nitride thin films by Pulsed Laser Deposition

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• Título: Correlation between optical, morphological and compositional properties of Aluminum Nitride thin films by Pulsed Laser Deposition
• Autor: Pérez Taborda, Jaime Andrés; Vera Londoño, Liliana; Riascos, Henry
• Publicación original: IEEE Sensors Journal; Vol. 16, No. 2, 2016
• Descripción física: PDF
• Nota general:
  • AlN thin films were grown in a N2 atmosphere onto a Si/Si3N4 substrate by pulsed laser ablation. We have varied the substrate temperature for the thin film growth, using X-ray Reflectometry (XRR) analysis, we have characterized the thickness and density of the thin layer and the interface roughness from the X-ray reflectivity profiles.
    Experimental data showed that the root-mean-square roughness was in the range of 0.3 nm. X-ray photoelectron spectroscopy (XPS) was employed to characterize the chemical.
• Notas de reproducción original: Digitalización realizada por la Biblioteca Virtual del Banco de la República (Colombia)
• Notas:
  • Resumen: Pulsed laser deposition; Aluminium nitride; Sensors acustic wave
  • © Derechos reservados del autor
  • Colfuturo
• Forma/género: texto
• Idioma: inglés
• Institución origen: Biblioteca Virtual del Banco de la República
• Encabezamiento de materia:
  • Tecnología; Tecnología / Ciencias médicas Medicina; Tecnología / Ingeniería y operaciones afines